JPH02673Y2 - - Google Patents

Info

Publication number
JPH02673Y2
JPH02673Y2 JP18289183U JP18289183U JPH02673Y2 JP H02673 Y2 JPH02673 Y2 JP H02673Y2 JP 18289183 U JP18289183 U JP 18289183U JP 18289183 U JP18289183 U JP 18289183U JP H02673 Y2 JPH02673 Y2 JP H02673Y2
Authority
JP
Japan
Prior art keywords
vacuum chamber
test object
leak
holder
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18289183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6090649U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18289183U priority Critical patent/JPS6090649U/ja
Publication of JPS6090649U publication Critical patent/JPS6090649U/ja
Application granted granted Critical
Publication of JPH02673Y2 publication Critical patent/JPH02673Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP18289183U 1983-11-27 1983-11-27 リ−クテスト装置 Granted JPS6090649U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18289183U JPS6090649U (ja) 1983-11-27 1983-11-27 リ−クテスト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18289183U JPS6090649U (ja) 1983-11-27 1983-11-27 リ−クテスト装置

Publications (2)

Publication Number Publication Date
JPS6090649U JPS6090649U (ja) 1985-06-21
JPH02673Y2 true JPH02673Y2 (en]) 1990-01-09

Family

ID=30395959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18289183U Granted JPS6090649U (ja) 1983-11-27 1983-11-27 リ−クテスト装置

Country Status (1)

Country Link
JP (1) JPS6090649U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19935293A1 (de) * 1999-07-27 2001-02-01 Leybold Vakuum Gmbh Folienlecksuchkammer

Also Published As

Publication number Publication date
JPS6090649U (ja) 1985-06-21

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